View all instruments of this unit Evaporation of material on substrate Evatec BAK 761
Basic Information
| Name: | Evaporation of material on substrate | |
| Manufacturer: | Evatec | |
| Model: | BAK 761 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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| Inventory number: | EVA03 | |
Description
In this process the source material is heated until it vaporizes, and then the vapor condenses onto the substrate, forming a thin film.
We offer this for different materials:
- Al
- SiO2
- Al2O3
- TiO2
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Last Update
Last updated at: 14 January 2025 at 10:52:35