Dresden
Technology Portal

 
Your access to research infrastructure and know-how
de|en
View all instruments of this unit

Laser Scanning Microscope Keyence VK-X200

Basic Information

Name: Laser Scanning Microscope
Manufacturer: Keyence
Model: VK-X200
Facility: 200 mm MEMS-Cleanroom
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)
Inventory number: MIC19

Description

The Laser Scanning Microscope is used for the analyzation of surface Topology. 

Options of instrument usage

Points of Contact

Jörg Amelung
Email:
Phone:
+49 351 88 23-4691

Associated Services

Name Preview Actions
Bonding and assembly of wafer

Last Update

Last updated at: 14 January 2025 at 13:59:13