Atomic Force Microscope (AFM) Veeco; Park Systems Nanoscope D3100; NX-Wafer
Basic Information
| Name: | Atomic Force Microscope (AFM) | |
| Manufacturer: | Veeco; Park Systems | |
| Model: | Nanoscope D3100; NX-Wafer | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) | |
| Inventory number: | MTR-AFM01; MTR-AFM02 | |
Description
Atomic Force Microscopy (AFM) is a high-resolution imaging technique used in semiconductor manufacturing to measure surface topography and properties at the nanometer scale by scanning a sharp tip over the sample surface. We offer Surface Topology measurement with or withour automated handling.
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Last Update
Last updated at: 14 January 2025 at 14:33:57