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Atomic Force Microscope (AFM) Veeco; Park Systems Nanoscope D3100; NX-Wafer

Basic Information

Name: Atomic Force Microscope (AFM)
Manufacturer: Veeco; Park Systems
Model: Nanoscope D3100; NX-Wafer
Facility: 200 mm MEMS-Cleanroom
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)
Inventory number: MTR-AFM01; MTR-AFM02

Description

Atomic Force Microscopy (AFM) is a high-resolution imaging technique used in semiconductor manufacturing to measure surface topography and properties at the nanometer scale by scanning a sharp tip over the sample surface. We offer Surface Topology measurement with or withour automated handling. 

Options of instrument usage

Points of Contact

Jörg Amelung
Email:
Phone:
+49 351 88 23-4691

Last Update

Last updated at: 14 January 2025 at 14:33:57