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View all instruments of this unit Wafer Inspection HSEB Axiospect 302
Basic Information
| Name: | Wafer Inspection | |
| Manufacturer: | HSEB | |
| Model: | Axiospect 302 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | MTR-INSPECT03 | |
Description
Bright Light Optical Inspection
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Metrology and Inspection |
Last Update
Last updated at: 14 January 2025 at 14:49:53