Surface Profilometer KLA-Tencor Corporation Surface Profiler P16

Informationen

Name:	Surface Profilometer
Hersteller:	KLA-Tencor Corporation
Modell:	Surface Profiler P16
Einrichtung:	MEMS Technologies Dresden
Partner:	Fraunhofer-Institut für Photonische Mikrosysteme (IPMS)

Beschreibung

The KLA-Tencore P-16 is a stylus profilometer capable of scanning over a full 200mm wafer without stitching. It offers a fast accurate method for measure step heights on patterned substrates as well as surface roughness. It also has the added stress measurement option.

Link zu weiteren Informationen

http://www.kla-tencor.com/surface-profilometry-and-metrology.html

Ansprechpartner

Mr. Michael Müller

Web:

http://www.ipms.fraunhofer.de/en/mems-foundry.html

Telefon:

+49 351 8823-130

Fax:

+49 351 8823-393

Notizen

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Bilder

Vorschau	Beschreibung
	KLA-Tencor Profilometer P 16

Letztes Update

Zuletzt aktualisiert am: 13. Juli 2017 um 11:54:12