The Gemini 500 SEM belongs to the high-end line of Zeiss SEMs. Released in April 2015, it offers superb performance especially at low landing energies. Resolution is specced at 0.6nm at 15kV and 1.2nm at 500V acceleration voltage. The system also offers vapour pressure mode with the use of the high resolution InLens detectors (up to 150Pa) achieving 1.8nm resolution at 3kV and 30pA N2 pressure (up to 500Pa with cascade detector). It is thus especially suited for insulating samples without coatings. The new column design together with the Tandem Decel option allows landing energies down to 5eV, while maintaing optimum imaging parameters. Working distances between 0.1-50mm allow to explore a wide range of sample dimensions. Further detectors include adjustable segmented slide-in backscatter and STEM detectors. 

Analytical add-ons installed on the sytem are a large area 150mm2 Oxford EDX detector and a high resolution, high sensitivity 1MP EBSD camera. These systems can be used in addition to the imaging to characterize the sample with respect to composition and crystallography.

Training and Acceptance of User agreement. SEM Experience on Zeiss machines is a plus.