Mask Aligner

Manufacturer: EV Group
Model: EVG 640
Facility: Institute of Electronic Packaging Technology

Mask Aligner für Photolithographie-Anwendungen in den Bereichen Advanced-Packaging, 3D-Packaging, MEMS, Interposer-Technologien, Fotovoltaik, Nanotechnologie und Wafer- und Board-Level-Optik

Furnace

Manufacturer: ATV Technologie GmbH
Model: ATV PEO-630
Facility: Institute of Electronic Packaging Technology

Brennofen zum Brennen und Sintern von Keramiken.

ICP-OES spectrometer (Inductively Coupled Plasma Optical Emission Spectrometry)

Manufacturer: Perkin Elmer
Facility: Chair of Inorganic Molecular Chemistry

UV-VIS Spectroscopy

Manufacturer: PerkinElmer Inc.
Model: LAMBDA™ 25
Facility: Chair of Inorganic Molecular Chemistry

FT-IR / Raman Spectrometer

Manufacturer: Bruker Optik GmbH
Model: VERTEX 70 / FT-Raman-Modul
Facility: Chair of Inorganic Molecular Chemistry

The VERTEX 70 / RAM II offers a vacile application flexibility. E.g. easy beam- splitter change without interferometer alignment and an automated internal dual sources and dual detectors option.

Echoic chamber

Facility: Chair of Acoustics and Haptics

Multi-Modalen Measurement Laboratory

Facility: Chair of Acoustics and Haptics

Large anechoic chamber

Facility: Chair of Acoustics and Haptics

Core drill

Manufacturer: DR. BENDER GmbH
Model: R5002 WDB-F
Facility: Institute of Geotechnical Engineering

Core drill

Manufacturer: DR. BENDER GmbH
Model: R5002 WDB-R
Facility: Institute of Geotechnical Engineering