View all instruments of this unit Defect Inspection System KLA-Tencor Corporation Surfscan 6220
Basic Information
| Name: | Defect Inspection System | |
| Manufacturer: | KLA-Tencor Corporation | |
| Model: | Surfscan 6220 | |
| Facility: | MEMS Technologies Dresden | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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Description
This tool detects, counts, and sizes defects.
Specifications:
- Throughput: 150 per hour for 200mm wafers
- Accommodates wafer sizes: 100,125,150,200mm
- Sensitivity: 0.09µm @ 80% capture rate
- Repeatability is less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon
- Contamination is less than 0.005 particles/cm² greater than 0.15µm Illumination source is 30mW Argon-Ion laser, 488 wavelength
- Haze Sensitivity is 0.02ppm
Link to Further Details
Points of Contact
Mr. Michael Müller
Web:
Phone:
+49 351 8823-130
Fax:
+49 351 8823-393
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
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KLA-Tencor Surfscan 6220 (Quelle: www.specequipment.com) |
Last Update
Last updated at: 13 July 2017 at 11:54:12