View all instruments of this unit Defect Measurement Applied Materials; Leica; Semilab Compass Pro; INS3000; FAaST 230
Basic Information
| Name: | Defect Measurement | |
| Manufacturer: | Applied Materials; Leica; Semilab | |
| Model: | Compass Pro; INS3000; FAaST 230 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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| Inventory number: | MTR-DEFECT02; MTR-INSPECT02; MTR-SPV01 | |
Description
We can perform defect inspection and defect Classification.
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Metrology and Inspection |
Images
| Preview | Description |
|---|---|
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KLA-Tencor Surfscan 6220 (Quelle: www.specequipment.com) |
Last Update
Last updated at: 14 January 2025 at 15:00:11