View all instruments of this unit Coating tel; Osiris; Süss SK-80EX, dns& TEL-ACT8 ; Basixx ST20+; VARIXX 806; Gamma80
Basic Information
| Name: | Coating | |
| Manufacturer: | tel; Osiris; Süss | |
| Model: | SK-80EX, dns& TEL-ACT8 ; Basixx ST20+; VARIXX 806; Gamma80 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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| Inventory number: | Track02, Track03, Track04, COAT06, COAT07 | |
Description
We provide services for coating of wafers on different instruments:
- Spin Coating and Delelopment (SK-80EX | dns & TEL ACT8 | tel)
- Spin Coating (Basixx ST20+ | Osiris)
- Spin and Spray Coating (VARIXX 806 | Osiris)
- Spray Coating and Development (Gamma80 | Süss)
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Lithography for wafers |
Last Update
Last updated at: 14 January 2025 at 09:56:19