View all instruments of this unit Contract, Proximity Süss MA 200 GEN 3
Basic Information
| Name: | Contract, Proximity | |
| Manufacturer: | Süss | |
| Model: | MA 200 GEN 3 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Lithography for wafers |
Last Update
Last updated at: 14 January 2025 at 09:49:47