View all instruments of this unit Preparation for Lithography of wafers ap&s 300 WB-08304
Basic Information
| Name: | Preparation for Lithography of wafers | |
| Manufacturer: | ap&s | |
| Model: | 300 WB-08304 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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| Inventory number: | MC02 | |
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Lithography for wafers |
Last Update
Last updated at: 14 January 2025 at 09:54:04