View all instruments of this unit Rapid Thermal Annealing (RTA) OEMgroup Heatpuls 8800
Basic Information
| Name: | Rapid Thermal Annealing (RTA) | |
| Manufacturer: | OEMgroup | |
| Model: | Heatpuls 8800 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | RTP02 | |
Description
This process involves quick heating and cooling of materials to modify their electrical or structural properties.
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Depostion of Material on Wafer |
Last Update
Last updated at: 14 January 2025 at 11:09:50