View all instruments of this unit Cleaning of wafer AP&S; Screen; PEMgroup GigaStep; SS-80BW-AVR; Cintillio SST
Basic Information
| Name: | Cleaning of wafer | |
| Manufacturer: | AP&S; Screen; PEMgroup | |
| Model: | GigaStep; SS-80BW-AVR; Cintillio SST | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | WET-CLEAN02; WET-EKC02; WET-SCR01 | |
Description
We offer the following wafer cleaning processes:
- Wafer Cleaning (SC1, SC2, DHF, RCA) (GigaStep I AP&S)
- Scrubber (SS-80BW-AVR | Screen)
- Wet Strip (EKC clean) (Cintillio SST | OEMgroup)
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Etching and cleaning of wafers |
Last Update
Last updated at: 14 January 2025 at 13:30:52