After more than 10 years of service, the Dresden Technology Portal will cease operations in the near future.
We will provide a link to the successor service once it goes live.
Please do not update any equipment entries here anymore. Use the new portal from now on.
We will provide a link to the successor service once it goes live.
Please do not update any equipment entries here anymore. Use the new portal from now on.
View all instruments of this unit Critical Dimension Scanning Electron Microscope (CD-SEM) Applied Materials Verity Lite
Basic Information
| Name: | Critical Dimension Scanning Electron Microscope (CD-SEM) | |
| Manufacturer: | Applied Materials | |
| Model: | Verity Lite | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | MTR-CDS01 | |
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Metrology and Inspection |
Last Update
Last updated at: 14 January 2025 at 14:25:28