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Stress measurement Frontier Semiconductor FSM500-TC-R

Basic Information

Name: Stress measurement
Manufacturer: Frontier Semiconductor
Model: FSM500-TC-R
Facility: 200 mm MEMS-Cleanroom
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)
Inventory number: MTR-TSM02

Description

We can perform Wafer bow, wafer stress and temperature dependent inspections. 

Options of instrument usage

Points of Contact

Jörg Amelung
Email:
Phone:
+49 351 88 23-4691

Associated Services

Name Preview Actions
Metrology and Inspection

Last Update

Last updated at: 14 January 2025 at 15:28:29