View all instruments of this unit Wafer measurement sentronics metrology SemDex M2
Basic Information
| Name: | Wafer measurement | |
| Manufacturer: | sentronics metrology | |
| Model: | SemDex M2 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
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| Inventory number: | MTR-WMS01 | |
Description
Wafer thickness, stress, Bow, trench depths, layer thickness measurements
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Metrology and Inspection |
Last Update
Last updated at: 14 January 2025 at 15:29:44