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CV Analysis Keithley, Keysight B1500, HP4294A, HP4295A, K590

Basic Information

Name: CV Analysis
Manufacturer: Keithley, Keysight
Model: B1500, HP4294A, HP4295A, K590
Facility: 200 mm MEMS-Cleanroom
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)
Inventory number: ANA-PROB01, WLR-PROB02

Description

  • Oxide thickness; flat band voltage; effective oxide charge; average bulk dop.; threshold voltage; Debye length; interface trap density (LF and HF-CV)
  • Relaxation time; minority carrier lifetime; surface scan velocity (TVS, CV BTS)

Options of instrument usage

Points of Contact

Jörg Amelung
Email:
Phone:
+49 351 88 23-4691

Associated Services

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Test of wafer

Last Update

Last updated at: 14 January 2025 at 15:50:03