View all instruments of this unit Sensor Actor Test System for MEMS / MOEMS Formfactor AP200
Basic Information
| Name: | Sensor Actor Test System for MEMS / MOEMS | |
| Manufacturer: | Formfactor | |
| Model: | AP200 | |
| Facility: | 200 mm MEMS-Cleanroom | |
| Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
|
| Inventory number: | MEMS-TEST01 | |
Description
Wafer size 8", temperature: 15 … 125 °C, SMU, laser light barriers, frequency counter, switch matrix, up to 72 channels
Options of instrument usage
- This instrument is used within a service or research collaboration.
Points of Contact
Associated Services
| Name | Preview | Actions |
|---|---|---|
| Test of wafer |
Last Update
Last updated at: 14 January 2025 at 15:53:14