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Center Nanoelectronic Technologies (CNT)

Parent Units:
Fraunhofer Institute for Photonic Microsystems (IPMS)
German name: "Center Nanoelektronische Technologien (CNT)".


web: http://www.ipms.fraunhofer.de/en/research-development/nanoelectronic.html
phone: +49 (0)351 2607-3040
fax: +49 (0) 351 2607 3005
address: Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), Königsbrücker Str. 178, 01099 Dresden, Germany
partner: Fraunhofer Institute for Photonic Microsystems


The business unit Center Nanoelectronic Technologies is focussing on the certification of processes and materials on 300 mm wafers. More than 40 tools and a clean room (ISO 14644-1 class 6) are available for the integration of customer processes and subnanometer characterization. CNT’s process modules are:

    • Nanopatterning,
    • High-k Devices,
    • Cu-Metallization and 
    • Sub-nm Characterization and Verification.

Various synergy effects arise out of the close cooperation with business partners and our capabilities and know-how. Thus the innovations can be integrated quickly into the manufacturing process and the production costs and time can be reduced considerably.


View instruments (11)


Parent Units

name type actions
Fraunhofer Institute for Photonic Microsystems (IPMS) Institute view

Daughter Units

name type instruments services
Analytics Facility (8)
High-k Devices Group (1)
Interconnects Group (2)

Last Update

Last updated at: 2016-07-14 07:55