Center Nanoelectronic Technologies (CNT)
Parent Units:Fraunhofer Institute for Photonic Microsystems (IPMS)
German name: "Center Nanoelektronische Technologien (CNT)".
Contact
| web: | http://www.ipms.fraunhofer.de/en/research-development/nanoelectronic.html | |
| phone: | +49 (0)351 2607-3040 | |
| fax: | +49 (0) 351 2607 3005 | |
| address: | Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), Königsbrücker Str. 178, 01099 Dresden, Germany | |
| partner: | Fraunhofer Institute for Photonic Microsystems |  |
Expertise
The business unit Center Nanoelectronic Technologies is focussing on the certification of processes and materials on 300 mm wafers. More than 40 tools and a clean room (ISO 14644-1 class 6) are available for the integration of customer processes and subnanometer characterization. CNT’s process modules are:
• Nanopatterning,
• High-k Devices,
• Cu-Metallization and
• Sub-nm Characterization and Verification.
Various synergy effects arise out of the close cooperation with business partners and our capabilities and know-how. Thus the innovations can be integrated quickly into the manufacturing process and the production costs and time can be reduced considerably.
instruments
View instruments (11)
Affiliations
Parent Units
| name | type | actions |
|---|---|---|
| Fraunhofer Institute for Photonic Microsystems (IPMS) | Institute |  view |
Daughter Units
| name | type | instruments | services |
|---|---|---|---|
| Analytics | Facility |
(8)
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| High-k Devices | Group |
(1)
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| Interconnects | Group |
(2)
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Last Update
Last updated at: 2016-07-14 07:55