Center Nanoelectronic Technologies (CNT)
Parent Units:Fraunhofer Institute for Photonic Microsystems (IPMS)
German name: "Center Nanoelektronische Technologien (CNT)".
Contact
web: | http://www.ipms.fraunhofer.de/en/research-development/nanoelectronic.html | |
phone: | +49 (0)351 2607-3040 | |
fax: | +49 (0) 351 2607 3005 | |
address: | Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), Königsbrücker Str. 178, 01099 Dresden, Germany | |
partner: | Fraunhofer Institute for Photonic Microsystems |
Expertise
The business unit Center Nanoelectronic Technologies is focussing on the certification of processes and materials on 300 mm wafers. More than 40 tools and a clean room (ISO 14644-1 class 6) are available for the integration of customer processes and subnanometer characterization. CNT’s process modules are:
• Nanopatterning,
• High-k Devices,
• Cu-Metallization and
• Sub-nm Characterization and Verification.
Various synergy effects arise out of the close cooperation with business partners and our capabilities and know-how. Thus the innovations can be integrated quickly into the manufacturing process and the production costs and time can be reduced considerably.
instruments
View instruments (11)Affiliations
Parent Units
name |
type |
actions |
---|---|---|
Fraunhofer Institute for Photonic Microsystems (IPMS) | Institute | view |
Daughter Units
name |
type |
instruments |
services |
---|---|---|---|
Analytics | Facility | (8) | |
High-k Devices | Group | (1) | |
Interconnects | Group | (2) |
Last Update
Last updated at: 2016-07-14 07:55 CEST