Analytics (Facility)
of the Center Nanoelectronic Technologies (CNT)Parent Units:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Contact
web: | http://www.ipms.fraunhofer.de/en/research-development/nanoelectronic/analytical-services.html | |
phone: | +49 351 26 07-3053 | |
fax: | +49 351 2607-3005 | |
address: | Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies, Analytics, Königsbrücker Str. 180, 01099 Dresden, Germany | |
Center: | Center Nanoelectronic Technologies (CNT) | |
partner: | Fraunhofer Institute for Photonic Microsystems |
Expertise
Fraunhofer IPMS-CNT has established a versatile analytical facility. Our expertise ranges from wafer-level characterization with inline X-ray scattering methods and three-dimensional Atomic Force Microscopy to two- and three-dimensional device characterization with analytical transmission electron microscopy and atom probe tomography.
Our in-line metrology enables us to determine physical and chemical properties of structures on 300 mm wafers with
• X-Ray Scattering
• Raman Spectroscopy
• Atom Probe Tomography
• Focussed Ion Beam (FIB)
• Electron Microscopy
• Time-of-Flight Secondary Ion Mass Sprectronomy
• Inline Metrology
All our tools for wafer level analysis are stationed in a class 1000 cleanroom environment that meets industrial standards.
More infos see brochure.
instruments
View instruments (8)Affiliations
Parent Units
name |
type |
actions |
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Center Nanoelectronic Technologies (CNT) | Center | view |
Last Update
Last updated at: 2017-02-06 07:08