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web: http://www.ipms.fraunhofer.de/en/research-development/nanoelectronic/analytical-services.html
phone: +49 351 26 07-3053
fax: +49 351 2607-3005
address: Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies, Analytics, Königsbrücker Str. 180, 01099 Dresden, Germany
Center: Center Nanoelectronic Technologies (CNT)
partner: Fraunhofer Institute for Photonic Microsystems


Fraunhofer IPMS-CNT has established a versatile analytical facility. Our expertise ranges from wafer-level characterization with inline X-ray scattering methods and three-dimensional Atomic Force Microscopy to two- and three-dimensional device characterization with analytical transmission electron microscopy and atom probe tomography.

Our in-line metrology enables us to determine physical and chemical properties of structures on 300 mm wafers with 

• X-Ray Scattering 
• Raman Spectroscopy
• Atom Probe Tomography
• Focussed Ion Beam (FIB) 
• Electron Microscopy 
• Time-of-Flight Secondary Ion Mass Sprectronomy
• Inline Metrology 

All our tools for wafer level analysis are stationed in a class 1000 cleanroom environment that meets industrial standards.

More infos see brochure.


View instruments (8)


Parent Units

name type actions
Center Nanoelectronic Technologies (CNT) Center view

Last Update

Last updated at: 2017-02-06 07:08 CET