The business unit Center Nanoelectronic Technologies is focussing on the certification of processes and materials on 300 mm wafers. More than 40 tools and a clean room (ISO 14644-1 class 6) are available for the integration of customer processes and subnanometer characterization. CNT’s process modules are:

    • Nanopatterning,
    • High-k Devices,
    • Cu-Metallization and 
    • Sub-nm Characterization and Verification.

Various synergy effects arise out of the close cooperation with business partners and our capabilities and know-how. Thus the innovations can be integrated quickly into the manufacturing process and the production costs and time can be reduced considerably.