Reflected-Light Microscope Zeiss Axio Imager M2m

Manufacturer: Zeiss
Model: Axio Imager M2m
Facility: Dresden Center for Nanoanalysis

Reflected Light microscope with up to 150x objective and Brightfield/Darkfield/Polarization/C-DIC imaging modes

Analytical FE-SEM

Manufacturer: Zeiss
Model: Gemini 500
Facility: Dresden Center for Nanoanalysis

"GeminiSEM 500 brings you more signal and more detail, especially at very low voltages. Its variable pressure mode makes you feel like you’re working in high vacuum." [www.zeiss.com]

Scanning Electron Microscope (FIB/ SEM)

Manufacturer: FEI (now Thermo Fisher)
Model: Helios Nanolab 660
Facility: Dresden Center for Nanoanalysis

The FEI Helios 660 is a state-of-the-art FIB/SEM tool with an electron image resolution of 0.9nm between 1kV and 30kV and a resolution of 1.5nm between 350V and 1kV with numerous in-situ addons.

Sub-Micron X-ray tomograph (XRM, XCT)

Manufacturer: Zeiss/ Xradia
Model: Versa 520
Facility: Dresden Center for Nanoanalysis

The Versa 520 is a state-of-the-art sub-micron X-ray tomograph with an ultimate spatial resolution of 700nm. It non-destructively creates full 3D images of samples and their interiors.

Transmission electron microscope

Manufacturer: JEOL
Model: F-200C
Facility: Dresden Center for Nanoanalysis

PicoIndenter

Manufacturer: Hysitron Inc. (heute: Bruker)
Model: PI 87
Facility: Dresden Center for Nanoanalysis

"The PI 87 is a depth-sensing mechanical test instrument that is designed to be interfaced with a scanning electron microscope (SEM) or FIB/SEM." [www.hysitron.com]