Scanning Electron Microscope (SEM) with coupled EBSD technology and KOSSEL processing

Facility: Working Group for Physical Materials Diagnostics

Im Röntgenographischen Speziallabor ist in einem multifunktionalen System die EBSD-Technik gemeinsam mit dem KOSSEL-Verfahren in einem REM gekoppelt worden.

Ultrasonic Flaw Detector

Manufacturer: GE Sensing & Inspection Technologies GmbH
Model: USM Go
Facility: Working Group for Physical Materials Diagnostics

The USM Go combines a thickness gauge and a flaw detector in one single lightweight instrument.

VIS/IR -DLIP μFAB System

Manufacturer: Designed by TU Dresden, LMO
Facility: Chair of Large Area Laser Based Surface Structuring

Tribometer / Rheometer

Manufacturer: Anton Paar
Model: Tribometer T-PTD 200 / Rheometer MRC 502
Facility: Chair of Large Area Laser Based Surface Structuring

Atomic Force Microscope

Manufacturer: Nanosurf
Model: CoreAFM
Facility: Chair of Large Area Laser Based Surface Structuring

Roll-to-Roll Nanoimprint Lithography

Manufacturer: Coatema
Model: Basecoater BC 51
Facility: Chair of Large Area Laser Based Surface Structuring

Laser Surface Texturing Machine

Manufacturer: GF machining solutions
Model: Laser P 600
Facility: Chair of Large Area Laser Based Surface Structuring

3D Direct Laser Interference Patterning System

Manufacturer: Designed by TU Dresden, LMO
Facility: Chair of Large Area Laser Based Surface Structuring

Edgewave Ultrakurzpulslaser (10 Watt) integrated in 3D Direct Laser Interference Patterning System:

Manufacturer: Edgewave GmbH
Model: PX200-3-GH
Facility: Chair of Large Area Laser Based Surface Structuring

Non-contact 3D optical profiler / White Light Interferometer / Confocal Microscope

Manufacturer: Sensofar Metrology
Model: S neox
Facility: Chair of Large Area Laser Based Surface Structuring