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Ellipsometer Porosimeter (EP) Semilab Co. Ltd. EP5

Basic Information

Name: Ellipsometer Porosimeter (EP)
Manufacturer: Semilab Co. Ltd.
Model: EP5
Facility: Interconnects of the Center Nanoelectronic Technologies (CNT)
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)

Description

Measure/Resolution:
porosity, pore size distribution
SE: 400nm - 800nm

Link to Further Details

https://www.semilab.hu/products

Points of Contact

Dr. Benjamin Uhlig
Phone:
+49 351 2607-3064
Fax:
+49 351 2607-3005

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:12