Ellipsometer Porosimeter (EP) Semilab Co. Ltd. EP5
Basic Information
Name: | Ellipsometer Porosimeter (EP) | |
Manufacturer: | Semilab Co. Ltd. | |
Model: | EP5 | |
Facility: | Interconnects of the Center Nanoelectronic Technologies (CNT) | |
Partner: | Fraunhofer Institute for Photonic Microsystems (IPMS) |
Description
Measure/Resolution:
porosity, pore size distribution
SE: 400nm - 800nm
Link to Further Details
Points of Contact
Dr. Benjamin Uhlig
Web:
Phone:
+49 351 2607-3064
Fax:
+49 351 2607-3005
Notes
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).
Images
Last Update
Last updated at: 13 July 2017 at 11:54:12