Dresden
Technology Portal

 
Your access to research infrastructure and know-how
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The Dresden Technology Portal is a joint database that maps scientific instruments, services and technologies offered by our partners.
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3569 results

Type: instrument
Structure unit:
200 mm MEMS-Cleanroom
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA). This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA). manufacturer: Veeco
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Physical and chemical characterization of full wafers with high throughput without affecting the functionality of the wafer dies is a key to monitor the production of semiconductor devices. At
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Raman spectroscopy utilizes inelastic scattering of laser light to locally excite and image characteristic vibrational modes in a material. This scattering process involves the excitation or decay
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Full wafer light microscopy allows images of the whole wafer. Vacuum mounting for 200 mm and 300 mm wafers ensures best handling and stable acquisition of images. Automatic data acquisition of
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Focused Ion Beam is an essential tool in modern physical failure analysis. A finely focused ion beam allows for precise cutting into a sample. This tool is indispensable for the site-specific
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Our lab AFM from Oxford Instruments is additionally equipped with PFM (piezo force microscopy) and C-AFM (conductive AFM) modes. Normally we process tapping/non-contact mode for surface roughness
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
X-ray scattering probes the arrangement of atoms in a sample by utilizing the interference of X-rays scattered at lattice planes or interfaces. It provides information about structural properties
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
Electron microscopy uses an electron beam to illuminate a specimen and create a magnified image. Two different types of electron microscopes are available: scanning electron microscopes (SEM,
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
In time-of-flight secondary ion mass spectrometry (ToF-SIMS), a primary ion beam is used to produce monatomic and polyatomic particles (secondary ions) from the sample surface. The technique is used
Type: instrument
Structure unit:
Analytics and Metrology
Partner:
Fraunhofer Institute for Photonic Microsystems (IPMS)
X-ray photoelectron spectroscopy is a quantitative technique that probes the chemistry of a material. When the X-ray source impinges a sample, electrons are excited by the photoelectric effect. The
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