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Equipment of Faculty of Electrical and Computer Engineering

Faculty of Electrical and Computer Engineering
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131 results

 

Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.

 

Wafer saw

Manufacturer: Disco Technologies Japan
Model: DAD3350
Facility: Chair for Semiconductor Technology

 

Focused Ion Beam (FIB)

Manufacturer: FEI
Model: Expida 1285
Facility: Chair for Semiconductor Technology

 

Hitzdraht-Strömungsmesssystem

Manufacturer: Dantec Dynamics
Model: StreamLine 90N10
Facility: Laboratory for Measurement and Sensor System Techniques

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