Photo Plotter

Manufacturer: MIVA Technologies GmbH
Model: MIVA 26100
Facility: Institute of Electronic Packaging Technology

Feinstlineplotter u.a. zur Tageslichtbelichtung von s/w-Planfilmen und Glasplatten.

Mask Aligner

Manufacturer: EV Group
Model: EVG 640
Facility: Institute of Electronic Packaging Technology

Mask Aligner für Photolithographie-Anwendungen in den Bereichen Advanced-Packaging, 3D-Packaging, MEMS, Interposer-Technologien, Fotovoltaik, Nanotechnologie und Wafer- und Board-Level-Optik

Furnace

Manufacturer: ATV Technologie GmbH
Model: ATV PEO-630
Facility: Institute of Electronic Packaging Technology

Brennofen zum Brennen und Sintern von Keramiken.

Echoic chamber

Facility: Chair of Acoustics and Haptics

Multi-Modalen Measurement Laboratory

Facility: Chair of Acoustics and Haptics

Large anechoic chamber

Facility: Chair of Acoustics and Haptics

Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.

Wafer saw

Manufacturer: Disco Technologies Japan
Model: DAD3350
Facility: Chair for Semiconductor Technology

Focused Ion Beam (FIB)

Manufacturer: FEI
Model: Expida 1285
Facility: Chair for Semiconductor Technology

Smart Scale Modularization plant

Facility: Chair of Process Control Systems Engineering