Echoic chamber

Facility: Chair of Acoustics and Haptics

Multi-Modalen Measurement Laboratory

Facility: Chair of Acoustics and Haptics

Large anechoic chamber

Facility: Chair of Acoustics and Haptics

Stylus Profilometry

Manufacturer: Veeco
Model: Dektak 8
Facility: Chair for Semiconductor Technology

Profilometer bis 100mm Weglänge. Messungen intrinsischer Schichtspannungen.

Wafer saw

Manufacturer: Disco Technologies Japan
Model: DAD3350
Facility: Chair for Semiconductor Technology

Focused Ion Beam (FIB)

Manufacturer: FEI
Model: Expida 1285
Facility: Chair for Semiconductor Technology

Smart Scale Modularization plant

Facility: Chair of Process Control Systems Engineering

Hitzdraht-Strömungsmesssystem

Manufacturer: Dantec Dynamics
Model: StreamLine 90N10
Facility: Laboratory for Measurement and Sensor System Techniques

Reflexionsfreier Raum

Facility: Institut für Musikinstrumentenbau

CVS Analysator

Manufacturer: Metrohm AG
Model: VA Computrace 797
Facility: Chair for Semiconductor Technology