View all instruments of this unit Helios 5 PFIB CXe DualBeam ThermoFisher Helios 5 PFIB CXe
Basic Information
| Name: | Helios 5 PFIB CXe DualBeam | |
| Manufacturer: | ThermoFisher | |
| Model: | Helios 5 PFIB CXe | |
| Facility: | Microelectronic Materials and Nanoanalysis | |
| Partner: | Fraunhofer Institute for Ceramic Technologies and Systems (IKTS) |
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Description
Dual-beam microscope: SEM and Xe-Plasma-FIB
- SEM column
- magnetic immersion objective lens
- Schottky Field emmision gun
- UC+ monochromator
- PFIB column
- ion beam current range: 1.5pA to 2.5µA
- accelerating voltage: 500V to 30kV
- EDX and EBSD detectors
- Gans injection system (Pt and C)
- Slice and View
- Rocking mill
Points of Contact
Dr. Birgit Jost and Dr. André Clausner
Web:
Email:
Phone:
+49 351 88815-547
Fax:
+49 351 88815-509
Last Update
Last updated at: 27 February 2023 at 10:50:47