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View the profile: Microelectronic Materials and Nanoanalysis

Equipment of Microelectronic Materials and Nanoanalysis

Fraunhofer Institute for Ceramic Technologies and Systems
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Climate chamber

Facility: Microelectronic Materials and Nanoanalysis

 
X-ray Microscope Xradia NanoXCT-100

X-ray Microscope (XRM)

Manufacturer: Xradia (now Carl Zeiss Ultra)
Model: NanoXCT-100
Facility: Microelectronic Materials and Nanoanalysis

 
REM/FIB Zeiss CrossBeam NVision 40®

Field Emission Scanning Electron Microscope (FE SEM) with focused ion beam (REM/ FIB)

Manufacturer: Carl Zeiss SMT AG
Model: CrossBeam NVision 40 ®
Facility: Microelectronic Materials and Nanoanalysis

 

Helios 5 PFIB CXe DualBeam

Manufacturer: ThermoFisher
Model: Helios 5 PFIB CXe
Facility: Microelectronic Materials and Nanoanalysis

 
Agilent AFAM 5600 LS (Quelle: www.agilent.com)

Atomic Force Acoustic Microscope (AFM/AFAM)

Manufacturer: Agilent Technologies
Model: 5600 LS
Facility: Microelectronic Materials and Nanoanalysis

 
Spectroscopic Ellipsometer SENTECH SE850 (Quelle: www.fep.fraunhofer.de)

Spectroscopic Ellipsometer

Manufacturer: SENTECH Instruments GmbH
Model: SE850
Facility: Microelectronic Materials and Nanoanalysis

 

Atomic Force Acoustic Microscope (AFM/AFAM)

Manufacturer: Digital Instruments/ in-house development
Model: Dimension 3000
Facility: Microelectronic Materials and Nanoanalysis

 
Hysitron TriboIndenter® TI 950 (Quelle: www.hysitron.com)

Nanoindenter

Manufacturer: Hysitron Inc.
Model: TriboIndenter ® TI 950
Facility: Microelectronic Materials and Nanoanalysis

 
TEM Zeiss LIBRA® 200 HR MC Cs STEM

Transmission Electron Microscope (TEM)

Manufacturer: Carl Zeiss AG
Model: LIBRA® 200 HR MC Cs STEM
Facility: Microelectronic Materials and Nanoanalysis

 
Röntgendiffraktometer XRD 3000PTS (Quelle: www.mb.uni-siegen.de)

Röntgendiffraktometer XRD/XRR

Manufacturer: Firma Richard Seifert & Co. Ahrensburg (GE Inspection Technologies GmbH)
Model: XRD 3000PTS
Facility: Microelectronic Materials and Nanoanalysis

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