10 results
X-ray Microscope (XRM)
Manufacturer: Xradia (now Carl Zeiss Ultra) Model: NanoXCT-100 Facility: Microelectronic Materials and Nanoanalysis
Field Emission Scanning Electron Microscope (FE SEM) with focused ion beam (REM/ FIB)
Manufacturer: Carl Zeiss SMT AG Model: CrossBeam NVision 40 ® Facility: Microelectronic Materials and Nanoanalysis
Helios 5 PFIB CXe DualBeam
Manufacturer: ThermoFisher Model: Helios 5 PFIB CXe Facility: Microelectronic Materials and Nanoanalysis
Atomic Force Acoustic Microscope (AFM/AFAM)
Manufacturer: Agilent Technologies Model: 5600 LS Facility: Microelectronic Materials and Nanoanalysis
Spectroscopic Ellipsometer
Manufacturer: SENTECH Instruments GmbH Model: SE850 Facility: Microelectronic Materials and Nanoanalysis
Atomic Force Acoustic Microscope (AFM/AFAM)
Manufacturer: Digital Instruments/ in-house development Model: Dimension 3000 Facility: Microelectronic Materials and Nanoanalysis
Nanoindenter
Manufacturer: Hysitron Inc. Model: TriboIndenter ® TI 950 Facility: Microelectronic Materials and Nanoanalysis
Transmission Electron Microscope (TEM)
Manufacturer: Carl Zeiss AG Model: LIBRA® 200 HR MC Cs STEM Facility: Microelectronic Materials and Nanoanalysis
Röntgendiffraktometer XRD/XRR
Manufacturer: Firma Richard Seifert & Co. Ahrensburg (GE Inspection Technologies GmbH) Model: XRD 3000PTS Facility: Microelectronic Materials and Nanoanalysis