10 results
X-ray Microscope (XRM)
Manufacturer: Xradia (now Carl Zeiss Ultra)
Model: NanoXCT-100
Facility: Microelectronic Materials and Nanoanalysis
Field Emission Scanning Electron Microscope (FE SEM) with focused ion beam (REM/ FIB)
Manufacturer: Carl Zeiss SMT AG
Model: CrossBeam NVision 40 ®
Facility: Microelectronic Materials and Nanoanalysis
Helios 5 PFIB CXe DualBeam
Manufacturer: ThermoFisher
Model: Helios 5 PFIB CXe
Facility: Microelectronic Materials and Nanoanalysis
Atomic Force Acoustic Microscope (AFM/AFAM)
Manufacturer: Agilent Technologies
Model: 5600 LS
Facility: Microelectronic Materials and Nanoanalysis
Spectroscopic Ellipsometer
Manufacturer: SENTECH Instruments GmbH
Model: SE850
Facility: Microelectronic Materials and Nanoanalysis
Atomic Force Acoustic Microscope (AFM/AFAM)
Manufacturer: Digital Instruments/ in-house development
Model: Dimension 3000
Facility: Microelectronic Materials and Nanoanalysis
Nanoindenter
Manufacturer: Hysitron Inc.
Model: TriboIndenter ® TI 950
Facility: Microelectronic Materials and Nanoanalysis
Transmission Electron Microscope (TEM)
Manufacturer: Carl Zeiss AG
Model: LIBRA® 200 HR MC Cs STEM
Facility: Microelectronic Materials and Nanoanalysis
Röntgendiffraktometer XRD/XRR
Manufacturer: Firma Richard Seifert & Co. Ahrensburg (GE Inspection Technologies GmbH)
Model: XRD 3000PTS
Facility: Microelectronic Materials and Nanoanalysis