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View the profile: 200 mm MEMS-Cleanroom

Services of 200 mm MEMS-Cleanroom

Fraunhofer Institute for Photonic Microsystems
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Test of wafer

Facility: 200 mm MEMS-Cleanroom

 

Depostion of Material on Wafer

Facility: 200 mm MEMS-Cleanroom

 

Metrology and Inspection

Facility: 200 mm MEMS-Cleanroom

 

Bonding and assembly of wafer

Facility: 200 mm MEMS-Cleanroom

 

Etching and cleaning of wafers

Facility: 200 mm MEMS-Cleanroom

 

Lithography for wafers

Facility: 200 mm MEMS-Cleanroom

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