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Equipment of Institute of Electronic Packaging Technology

Institute of Electronic Packaging Technology
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Photo Plotter

Manufacturer: MIVA Technologies GmbH
Model: MIVA 26100
Facility: Institute of Electronic Packaging Technology

Feinstlineplotter u.a. zur Tageslichtbelichtung von s/w-Planfilmen und Glasplatten.

 

Mask Aligner

Manufacturer: EV Group
Model: EVG 640
Facility: Institute of Electronic Packaging Technology

Mask Aligner für Photolithographie-Anwendungen in den Bereichen Advanced-Packaging, 3D-Packaging, MEMS, Interposer-Technologien, Fotovoltaik, Nanotechnologie und Wafer- und Board-Level-Optik

 

Furnace

Manufacturer: ATV Technologie GmbH
Model: ATV PEO-630
Facility: Institute of Electronic Packaging Technology

Brennofen zum Brennen und Sintern von Keramiken.

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