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Equipment of 300 mm CMOS Cleanroom

Fraunhofer Institute for Photonic Microsystems
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14 results

 

X-Ray Scattering (XRD/XRR)

Manufacturer: Bruker Corporation
Model: D8 DISCOVER
Facility: Analytics and Metrology

 

Electron Microscopy

Manufacturer: Hitachi; Thermo Fischer; FEI Tecnai
Model: S-5000; Apreo S; F20
Facility: Analytics and Metrology

 

Time-Of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS)

Manufacturer: ION-TOF GmbH
Model: TOF.SIMS 300R
Facility: Analytics and Metrology

 

X-Ray Photoelectron Spectroscope (XPS)

Manufacturer: PHI Quantes Scanning XPS/HAXPES Microprobe
Facility: Analytics and Metrology

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