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Equipment of Center Nanoelectronic Technologies (CNT)

Fraunhofer Institute for Photonic Microsystems
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Confocal Raman Microscope

Manufacturer: Renishaw plc.
Model: inVia
Facility: Interconnects

 

Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)

Manufacturer: Hitachi High Technologies
Model: S-5000
Facility: Analytics

 

TOF-SIMS

Manufacturer: ION-TOF GmbH
Model: TOF.SIMS 300R
Facility: Analytics

 

Fourier Transform Infra Red Spectrometer (FT-IR)

Manufacturer: Varian Inc. (now: Agilent Technologies)
Model: 640-IR
Facility: High-k Devices

 

Ellipsometer Porosimeter (EP)

Manufacturer: Semilab Co. Ltd.
Model: EP5
Facility: Interconnects

 

Atom Probe Tomography Microscope (ATP)

Manufacturer: Imago Scientific Instruments (now: Ametek/ CAMECA)
Model: LEAP 3000X S
Facility: Analytics

 

Transmission Electron Microscope (TEM)

Manufacturer: FEI Company
Model: Tecnai F20 XT/STEM
Facility: Analytics

 

X-Ray Diffraction System (XRD/XRR)

Manufacturer: Bruker Corporation
Model: D8 DISCOVER
Facility: Analytics

 

X-Ray Photoelectron Spectroscope (XPS)

Manufacturer: Thermo Fisher Scientific Inc.
Model: Theta 300i
Facility: Analytics

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