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Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop) Hitachi High Technologies S-5000

Basic Information

Name: Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: Hitachi High Technologies
Model: S-5000
Facility: Analytics of the Center Nanoelectronic Technologies (CNT)
Partner: Fraunhofer Institute for Photonic Microsystems (IPMS)

Description

Measure/Resolution:

~ 2 nm

Accessory/Options:

~ 2 nm

Link to Further Details

http://www.hitachi-hightech.com

Points of Contact

Dr. Wenke Weinreich
Phone:
+49 351 26 07-3053
Fax:
+49 351 2607-3005

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:12