Atomic Force Microscopy (AFM) Oxford Instruments Asylum Research Cypher

Basic Information

Name:	Atomic Force Microscopy (AFM)
Manufacturer:	Oxford Instruments
Model:	Asylum Research Cypher
Facility:	Analytics and Metrology of the 300 mm CMOS Cleanroom
Partner:	Fraunhofer Institute for Photonic Microsystems (IPMS)

Description

Our lab AFM from Oxford Instruments is additionally equipped with PFM (piezo force microscopy) and C-AFM (conductive AFM) modes. Normally we process tapping/non-contact mode for surface roughness analysis in air. Our field of view is 30 x 30 µm², and typical sample sizes are 1 x 1 cm². Roughness or levels can be selected between 3 nm and 1 µm.

Link to Further Details

https://www.ipms.fraunhofer.de/content/dam/ipms/common/products/CNT/cnt-2021/Fraunhofer%20IPMS%20-%20Semiconductor%20Analytical%20Services.pdf

Points of Contact

Dr. Nora Haufe

Web:

https://www.ipms.fraunhofer.de/de/cleanrooms/analytics-and-characterization/300mm-Analytics-and-Metrology.html

Phone:

+49 351 26 07-3020

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Associated Services

Name	Preview	Actions
Analytics and Metrology

Images

Preview	Description
	CAMECA LEAP 4000 Si (Quelle: www.cameca.com)

Last Update

Last updated at: 20 December 2024 at 13:59:09