Raman spectroscopy utilizes inelastic scattering of laser light to locally excite and image characteristic vibrational modes in a material. This scattering process involves the excitation or decay of characteristic vibrations of chemical bonds. As a result Raman spectroscopy can be used for the analysis of the orientation, phase and composition of a material as well as or lateral resolved stress and temperature mappings. Our tools allow for a lateral resolution down to 300 nm. Different lasers allow us to vary the surface sensitivity, varying the integration depth from only a few nanometers to a few micrometers.

Capabilities

• Stress maps of trenches (top down & cross section)
• Laterally resolved temperature measurements
• Laterally resolved phase analysis