Equipment of 200 mm MEMS-Cleanroom | Dresden Technology Portal

Sensor Actor Test System for MEMS / MOEMS

Manufacturer: Formfactor
Model: AP200
Facility: 200 mm MEMS-Cleanroom

Characterization of Insulator Integrity and Reliability

Manufacturer: Keithley
Model: K236, K237 und K238
Facility: 200 mm MEMS-Cleanroom

CV Analysis

Manufacturer: Keithley, Keysight
Model: B1500, HP4294A, HP4295A, K590
Facility: 200 mm MEMS-Cleanroom

Non-electrical Test

Manufacturer: Endevco
Model: pH Sensor Tester Fraunhofer IPMS
Facility: 200 mm MEMS-Cleanroom

Electro-Optical Test System for Micro Displays and Sensors

Manufacturer: Formfactor
Model: F1600C Pike Camera, 20 Mpix IDS Color Camera Spectrometer Jeti Specbos 1211UV PA300
Facility: 200 mm MEMS-Cleanroom

Parametric Test System

Manufacturer: Keithley
Model: S530 basic EG4090µ; B1500 EG4090µ UF3000EX
Facility: 200 mm MEMS-Cleanroom

Mixed Signal Testing

Manufacturer: Advantest; Cascade Microtech
Model: M3650 / EG4090μ / UF3000EX; M3670-Falcon / EG4090μ+ / PA300 ; V93000 SmartScale / EG4090µ / UF3000EX|
Facility: 200 mm MEMS-Cleanroom

Wafer measurement

Manufacturer: sentronics metrology
Model: SemDex M2
Facility: 200 mm MEMS-Cleanroom

Stress measurement

Manufacturer: Frontier Semiconductor
Model: FSM500-TC-R
Facility: 200 mm MEMS-Cleanroom

4-point measuring station for Sheet resistance

Manufacturer: veonis technologies
Model: CDE ResMap168
Facility: 200 mm MEMS-Cleanroom