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View the profile: 200 mm MEMS-Cleanroom

Equipment of 200 mm MEMS-Cleanroom

Fraunhofer Institute for Photonic Microsystems
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Profilometer

Manufacturer: KLA Tencor
Model: surface Profiler P16+
Facility: 200 mm MEMS-Cleanroom

 
KLA-Tencor Surfscan 6220 (Quelle: www.specequipment.com)

Defect Measurement

Manufacturer: Applied Materials; Leica; Semilab
Model: Compass Pro; INS3000; FAaST 230
Facility: 200 mm MEMS-Cleanroom

 

Wafer Inspection

Manufacturer: HSEB
Model: Axiospect 302
Facility: 200 mm MEMS-Cleanroom

 
Wyko NT8000 (Quelle: www.fabsurplus.com)

White-Light Interferometer (Optical Profiler)

Manufacturer: Veeco Instruments
Model: NT8000
Facility: 200 mm MEMS-Cleanroom

 
Ellipsometer Woollam VB-400 (Quelle: www.appropedia.org)

Ellipsometer

Manufacturer: J.A. Woollam Co. Inc.
Model: VB-400
Facility: 200 mm MEMS-Cleanroom

 

Surface Characterization

Manufacturer: Krüss
Model: DSA100W
Facility: 200 mm MEMS-Cleanroom

 

Atomic Force Microscope (AFM)

Manufacturer: Veeco; Park Systems
Model: Nanoscope D3100; NX-Wafer
Facility: 200 mm MEMS-Cleanroom

 

Critical Dimension Scanning Electron Microscope (CD-SEM)

Manufacturer: Applied Materials
Model: Verity Lite
Facility: 200 mm MEMS-Cleanroom

 
FE SEM Jeol JSM-6700F

Field Emission Scanning Electron Microscope (FE SEM )

Manufacturer: JEOL GmbH; FEI
Model: JSM-6700F; Helios Nanolab 660
Facility: 200 mm MEMS-Cleanroom

 

Film Thickness Measurement

Manufacturer: Screen; Olympian
Model: Lambda Ace RE-3300; n & k
Facility: 200 mm MEMS-Cleanroom