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View the profile: MEMS Technologies Dresden

Equipment of MEMS Technologies Dresden

Fraunhofer Institute for Photonic Microsystems
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FE SEM Jeol JSM-6700F

Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)

Manufacturer: JEOL GmbH
Model: JSM-6700F
Facility: MEMS Technologies Dresden

 
KLA-Tencor Profilometer P 16

Surface Profilometer

Manufacturer: KLA-Tencor Corporation
Model: Surface Profiler P16
Facility: MEMS Technologies Dresden

 
White-Light Interferometer NT9800 (Quelle: www.veeco.com)

Weisslichtinterferometer / White-Light Interferometer (Optical Profiler)

Manufacturer: Veeco Instruments
Model: NT9800
Facility: MEMS Technologies Dresden

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