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View the profile: 200 mm MEMS-Cleanroom

Equipment of 200 mm MEMS-Cleanroom

Fraunhofer Institute for Photonic Microsystems
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Dry etch

Manufacturer: LAM; SPTS
Model: ALLIANCE 9600PTX; Omega fxP
Facility: 200 mm MEMS-Cleanroom

 

Grinding of surfaces

Manufacturer: DISCO Corp.
Model: DGP8761
Facility: 200 mm MEMS-Cleanroom

 

Chemical Mechanical Polishing (CMP)

Manufacturer: Applied Materials
Model: DESICA
Facility: 200 mm MEMS-Cleanroom

 

Rapid Thermal Annealing (RTA)

Manufacturer: OEMgroup
Model: Heatpuls 8800
Facility: 200 mm MEMS-Cleanroom

 

Oxidation and Tempering

Manufacturer: Inotherm; TEL; Centroterm; Inotherm
Model: LDS200-2; Alpha 8SE; E1550 HT 320-4; E1550-310-5; LDS-200-2
Facility: 200 mm MEMS-Cleanroom

 

Evaporation of material on substrate

Manufacturer: Evatec
Model: BAK 761
Facility: 200 mm MEMS-Cleanroom

 

Sputtering (PVD)

Manufacturer: von Ardenne Anlagentechnik; SPTS
Model: CS400S; Sigma 204
Facility: 200 mm MEMS-Cleanroom

 

Low-Pressure Chemical Vapor Deposition (LP-CVD)

Manufacturer: Centroterm
Model: E1550 HT 320-4
Facility: 200 mm MEMS-Cleanroom

 

Plasma-Enhanced Chemical Vapor Deposition (PE-CVD)

Manufacturer: Applied Materials
Model: Centura
Facility: 200 mm MEMS-Cleanroom

 

Atomic Layer Deposition (ALD)

Manufacturer: Picosun; SPTS
Model: P-300; MVD 300 Batch Reactor
Facility: 200 mm MEMS-Cleanroom