Dresden
Technology Portal

 
Your access to research infrastructure and know-how
 
de|en
View the profile: 200 mm MEMS-Cleanroom

Equipment of 200 mm MEMS-Cleanroom

Fraunhofer Institute for Photonic Microsystems
Filter:

institutions: this unit(45), daughter units(0),

Results per page:
Sort:

45 results

 

Laser Scanning Microscope

Manufacturer: Keyence
Model: VK-X200
Facility: 200 mm MEMS-Cleanroom

 

Material Test

Manufacturer: Zwick / Roell
Model: 2.5kN Zwicki
Facility: 200 mm MEMS-Cleanroom

 

Laser Marking of various materials

Manufacturer: Keysight
Model: MD-U1000
Facility: 200 mm MEMS-Cleanroom

 

Wafer Packaging

Manufacturer: Häcker Automation; Finetech; Ficontec
Model: VICO Xtec / Laser; FEMTO; IL2000
Facility: 200 mm MEMS-Cleanroom

 

Wafer Dicing

Manufacturer: DISCO Corp.
Model: DAD 651
Facility: 200 mm MEMS-Cleanroom

 

Wafer Bonding

Manufacturer: SUSS
Model: SB8 & XB8; BA8 Gen3
Facility: 200 mm MEMS-Cleanroom

 

Wet Etch

Manufacturer: AP&S; ClassOne Technology
Model: Manual wet bench; Trident SAT
Facility: 200 mm MEMS-Cleanroom

 

Cleaning of wafer

Manufacturer: AP&S; Screen; PEMgroup
Model: GigaStep; SS-80BW-AVR; Cintillio SST
Facility: 200 mm MEMS-Cleanroom

 

Ashing

Manufacturer: tfd;Tryman
Model: GIGAbatch 380M; NEO2232
Facility: 200 mm MEMS-Cleanroom

 

Gas Phase Release Techniques

Manufacturer: KLA
Model: Monarch and Xetch
Facility: 200 mm MEMS-Cleanroom