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Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

Fraunhofer Institute for Photonic Microsystems (IPMS)
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Defect Inspection System

Manufacturer: KLA-Tencor Corporation
Model: Surfscan 6220
Facility: MEMS Technologies Dresden

 

Tunable Diode Laser System

Manufacturer: New Focus™
Model: TLB-6200
Facility: MEMS Technologies Dresden

 

Confocal Raman Microscope

Manufacturer: Renishaw plc.
Model: inVia
Facility: Interconnects

 

Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)

Manufacturer: Hitachi High Technologies
Model: S-5000
Facility: Analytics

 

TOF-SIMS

Manufacturer: ION-TOF GmbH
Model: TOF.SIMS 300R
Facility: Analytics

 

Twymen-Green-Interferometer

Manufacturer: TRIOPTICS GmbH (FISBA OPTIK GmbH)
Model: µPhase® DCI 2
Facility: MEMS Technologies Dresden

 

Microscope Scanning Vibrometer

Manufacturer: Polytec GmbH
Model: MSV-300
Facility: MEMS Technologies Dresden

 

X-Ray Diffractometer (XRD)

Manufacturer: Siemens AG
Model: D5000
Facility: MEMS Technologies Dresden

 

Fourier Transform Infra Red Spectrometer (FT-IR)

Manufacturer: Varian Inc. (now: Agilent Technologies)
Model: 640-IR
Facility: High-k Devices

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