View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

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Parametric Test System

Manufacturer: Keithley
Model: S530 basic EG4090µ; B1500 EG4090µ UF3000EX
Facility: 200 mm MEMS-Cleanroom

Mixed Signal Testing

Manufacturer: Advantest; Cascade Microtech
Model: M3650 / EG4090μ / UF3000EX; M3670-Falcon / EG4090μ+ / PA300 ; V93000 SmartScale / EG4090µ / UF3000EX|
Facility: 200 mm MEMS-Cleanroom

Wafer measurement

Manufacturer: sentronics metrology
Model: SemDex M2
Facility: 200 mm MEMS-Cleanroom

Stress measurement

Manufacturer: Frontier Semiconductor
Model: FSM500-TC-R
Facility: 200 mm MEMS-Cleanroom

4-point measuring station for Sheet resistance

Manufacturer: veonis technologies
Model: CDE ResMap168
Facility: 200 mm MEMS-Cleanroom

Profilometer

Manufacturer: KLA Tencor
Model: surface Profiler P16+
Facility: 200 mm MEMS-Cleanroom

KLA-Tencor Surfscan 6220 (Quelle: www.specequipment.com)

Defect Measurement

Manufacturer: Applied Materials; Leica; Semilab
Model: Compass Pro; INS3000; FAaST 230
Facility: 200 mm MEMS-Cleanroom

Wafer Inspection

Manufacturer: HSEB
Model: Axiospect 302
Facility: 200 mm MEMS-Cleanroom

Wyko NT8000 (Quelle: www.fabsurplus.com)

White-Light Interferometer (Optical Profiler)

Manufacturer: Veeco Instruments
Model: NT8000
Facility: 200 mm MEMS-Cleanroom

Ellipsometer

Manufacturer: J.A. Woollam Co. Inc.
Model: VB-400
Facility: 200 mm MEMS-Cleanroom

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