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View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

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Ellipsometer Woollam VB-400 (Quelle: www.appropedia.org)

Ellipsometer

Manufacturer: J.A. Woollam Co. Inc.
Model: VB-400
Facility: MEMS Technologies Dresden

Energy Dispersive X-ray Spectroscope (EDS)

Manufacturer: EDAX Inc.
Model: Apollo 40
Facility: MEMS Technologies Dresden

Ellipsometer Porosimeter Semilab EP5 (Quelle: www.azom.com)

Ellipsometer Porosimeter (EP)

Manufacturer: Semilab Co. Ltd.
Model: EP5
Facility: Interconnects

AMAT Defect Inspection

Manufacturer: Applied Materials Inc. (AMAT)
Model: Compass Pro
Facility: MEMS Technologies Dresden

Thermo Fisher Scientific Nicolet FT-IR Spectrometer 6700 (Quelle: www.labx.com)

FT-IR Microspectroscopy System

Manufacturer: Thermo Fisher Scientific GmbH
Model: Nicolet FT-IR Spectrometer 6700
Facility: MEMS Technologies Dresden

Wyko NT8000 (Quelle: www.fabsurplus.com)

Weisslichtinterferometer / White-Light Interferometer (Optical Profiler)

Manufacturer: Veeco Instruments
Model: NT8000
Facility: MEMS Technologies Dresden

CAMECA LEAP 4000 Si (Quelle: www.cameca.com)

Atom Probe Tomography Microscope (ATP)

Manufacturer: Imago Scientific Instruments (now: Ametek/ CAMECA)
Model: LEAP 3000X S
Facility: Analytics

FEI Tecnai F20 XT/STEM (Quelle: www.fei.com)

Transmission Electron Microscope (TEM)

Manufacturer: FEI Company
Model: Tecnai F20 XT/STEM
Facility: Analytics

Bruker XRD D8 DISCOVER (Quelle: www.bruker.com)

X-Ray Diffraction System (XRD/XRR)

Manufacturer: Bruker Corporation
Model: D8 DISCOVER
Facility: Analytics

XPS Thermo Fisher Scientific Theta 300 (Quelle: www.thermoscientific.com)

X-Ray Photoelectron Spectroscope (XPS)

Manufacturer: Thermo Fisher Scientific Inc.
Model: Theta 300i
Facility: Analytics

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