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View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

Fraunhofer Institute for Photonic Microsystems (IPMS)
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FE SEM Jeol JSM-6700F

Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)

Manufacturer: JEOL GmbH
Model: JSM-6700F
Facility: MEMS Technologies Dresden

 
KLA-Tencor Profilometer P 16

Surface Profilometer

Manufacturer: KLA-Tencor Corporation
Model: Surface Profiler P16
Facility: MEMS Technologies Dresden

 
White-Light Interferometer NT9800 (Quelle: www.veeco.com)

Weisslichtinterferometer / White-Light Interferometer (Optical Profiler)

Manufacturer: Veeco Instruments
Model: NT9800
Facility: MEMS Technologies Dresden

 
Bruker TXRF-Spectrometer S2 Picofox (Quelle: www.bruker.com)

Total Reflection X-Ray Fluorescence Spectrometer (TXRF)

Manufacturer: Bruker Corporation
Model: S2 Picofox
Facility: Analytics

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