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View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

Fraunhofer Institute for Photonic Microsystems (IPMS)
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Surface Characterization

Manufacturer: Krüss
Model: DSA100W
Facility: 200 mm MEMS-Cleanroom

 

Atomic Force Microscope (AFM)

Manufacturer: Veeco; Park Systems
Model: Nanoscope D3100; NX-Wafer
Facility: 200 mm MEMS-Cleanroom

 

Critical Dimension Scanning Electron Microscope (CD-SEM)

Manufacturer: Applied Materials
Model: Verity Lite
Facility: 200 mm MEMS-Cleanroom

 
FE SEM Jeol JSM-6700F

Field Emission Scanning Electron Microscope (FE SEM )

Manufacturer: JEOL GmbH; FEI
Model: JSM-6700F; Helios Nanolab 660
Facility: 200 mm MEMS-Cleanroom

 

Film Thickness Measurement

Manufacturer: Screen; Olympian
Model: Lambda Ace RE-3300; n & k
Facility: 200 mm MEMS-Cleanroom

 

Laser Scanning Microscope

Manufacturer: Keyence
Model: VK-X200
Facility: 200 mm MEMS-Cleanroom

 

Material Test

Manufacturer: Zwick / Roell
Model: 2.5kN Zwicki
Facility: 200 mm MEMS-Cleanroom

 

Laser Marking of various materials

Manufacturer: Keysight
Model: MD-U1000
Facility: 200 mm MEMS-Cleanroom

 

Wafer Packaging

Manufacturer: Häcker Automation; Finetech; Ficontec
Model: VICO Xtec / Laser; FEMTO; IL2000
Facility: 200 mm MEMS-Cleanroom

 

Wafer Dicing

Manufacturer: DISCO Corp.
Model: DAD 651
Facility: 200 mm MEMS-Cleanroom

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