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View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

Fraunhofer Institute for Photonic Microsystems (IPMS)
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Evaporation of material on substrate

Manufacturer: Evatec
Model: BAK 761
Facility: 200 mm MEMS-Cleanroom

 

Sputtering (PVD)

Manufacturer: von Ardenne Anlagentechnik; SPTS
Model: CS400S; Sigma 204
Facility: 200 mm MEMS-Cleanroom

 

Low-Pressure Chemical Vapor Deposition (LP-CVD)

Manufacturer: Centroterm
Model: E1550 HT 320-4
Facility: 200 mm MEMS-Cleanroom

 

Plasma-Enhanced Chemical Vapor Deposition (PE-CVD)

Manufacturer: Applied Materials
Model: Centura
Facility: 200 mm MEMS-Cleanroom

 

Atomic Layer Deposition (ALD)

Manufacturer: Picosun; SPTS
Model: P-300; MVD 300 Batch Reactor
Facility: 200 mm MEMS-Cleanroom

 

Coating

Manufacturer: tel; Osiris; Süss
Model: SK-80EX, dns& TEL-ACT8 ; Basixx ST20+; VARIXX 806; Gamma80
Facility: 200 mm MEMS-Cleanroom

 

Preparation for Lithography of wafers

Manufacturer: ap&s
Model: 300 WB-08304
Facility: 200 mm MEMS-Cleanroom

 

Contract, Proximity

Manufacturer: Süss
Model: MA 200 GEN 3
Facility: 200 mm MEMS-Cleanroom

 
X-Ray Diffractometer Siemens D5000 (Quelle: www.labx.com)

X-Ray Diffractometer (XRD)

Manufacturer: Siemens AG
Model: D5000
Facility: 200 mm MEMS-Cleanroom

 

Deep Ultraviolet (DUV)- Lithography

Manufacturer: Nikon
Model: NSR-S210D and NSR-2205i 1E2
Facility: 200 mm MEMS-Cleanroom