24 results
Defect Inspection System
Manufacturer: KLA-Tencor Corporation Model: Surfscan 6220 Facility: MEMS Technologies Dresden
Tunable Diode Laser System
Manufacturer: New Focus™ Model: TLB-6200 Facility: MEMS Technologies Dresden
Field Emission Scanning Electron Microscope (FE SEM / FE REM Rasterelektronenmikroskop)
Manufacturer: Hitachi High Technologies Model: S-5000 Facility: Analytics
Twymen-Green-Interferometer
Manufacturer: TRIOPTICS GmbH (FISBA OPTIK GmbH) Model: µPhase® DCI 2 Facility: MEMS Technologies Dresden
Microscope Scanning Vibrometer
Manufacturer: Polytec GmbH Model: MSV-300 Facility: MEMS Technologies Dresden
X-Ray Diffractometer (XRD)
Manufacturer: Siemens AG Model: D5000 Facility: MEMS Technologies Dresden
Fourier Transform Infra Red Spectrometer (FT-IR)
Manufacturer: Varian Inc. (now: Agilent Technologies) Model: 640-IR Facility: High-k Devices
DualBeam Field Emission Scanning Electron Microscope with Focused Ion Beam (FE SEM/ FIB)
Manufacturer: FEI Company Model: Strata 400 STEM Facility: Analytics