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View the profile: Fraunhofer Institute for Photonic Microsystems (IPMS)

Equipment of Fraunhofer Institute for Photonic Microsystems (IPMS)

Fraunhofer Institute for Photonic Microsystems (IPMS)
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Wafer Cleaning

Facility: 300 mm CMOS Cleanroom

 

Wafer Plating

Facility: 300 mm CMOS Cleanroom

 

Chemical Mechanical Planarization (CMP)

Facility: 300 mm CMOS Cleanroom

 

Nanopatterning via E-Beam Lithography

Facility: 300 mm CMOS Cleanroom

 

Atomic Layer Deposition (ALD)

Facility: 300 mm CMOS Cleanroom

 

Sensor Actor Test System for MEMS / MOEMS

Manufacturer: Formfactor
Model: AP200
Facility: 200 mm MEMS-Cleanroom

 

Characterization of Insulator Integrity and Reliability

Manufacturer: Keithley
Model: K236, K237 und K238
Facility: 200 mm MEMS-Cleanroom

 

CV Analysis

Manufacturer: Keithley, Keysight
Model: B1500, HP4294A, HP4295A, K590
Facility: 200 mm MEMS-Cleanroom

 

Non-electrical Test

Manufacturer: Endevco
Model: pH Sensor Tester Fraunhofer IPMS
Facility: 200 mm MEMS-Cleanroom

 

Electro-Optical Test System for Micro Displays and Sensors

Manufacturer: Formfactor
Model: F1600C Pike Camera, 20 Mpix IDS Color Camera Spectrometer Jeti Specbos 1211UV PA300
Facility: 200 mm MEMS-Cleanroom